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Nanoindenter Technical Documentation: Micro Scratch Test

This is a PDF document on the micro-scratch test for silicon wafer coating agents. Please download it for details.

Polymer coatings are widely used in various industrial fields such as semiconductors, solar energy, optics, and biomedicine to enhance the mechanical properties, abrasion resistance, optical properties, and chemical properties of various substrates. The inherent quality of the coating and the compatibility at the interface of the coating/substrate system determine the durability and lifespan of the polymer coating. Scratch tests and micro-scratch tests have developed into one of the most widely applied methods for evaluating the cohesive strength and adhesive strength of coatings. The critical load at which a specific type of coating failure occurs as the applied load gradually increases is widely recognized as a reliable means to determine and compare the adhesive and cohesive properties of the coating. The most commonly used indenter in scratch tests is a conical Rockwell diamond indenter. However, when conducting scratch tests on soft polymer coatings deposited on brittle substrates like silicon wafers, the conical indenter tends to form grooves that scrape through the coating rather than causing cracks or delamination.

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